MEASUREMENT APPARATUS
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United States of America Patent
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Issued Date -
May 2, 2013
app pub date -
Oct 22, 2012
filing date -
Nov 1, 2011
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
The present invention provides a measurement apparatus which measures a distance between a reference surface and a test surface, including n (n=an integer of not smaller than 2) frequency scanning light sources, a splitting element configured to split beam from each of the n frequency scanning light sources to enter the reference surface and the test surface, a detector configured to detect n interference beams at once, formed by interference of beam reflected by the reference surface and beam reflected by the test surface, and output an interference signal, and a processing unit configured to perform processing of obtaining the distance.
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