OPTICAL APPARATUS, POSITION DETECTION APPARATUS, MICROSCOPE APPARATUS, AND EXPOSURE APPARATUS
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United States of America Patent
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Issued Date -
May 2, 2013
app pub date -
Oct 10, 2012
filing date -
Oct 28, 2011
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
The present invention provides an apparatus including an aperture stop including a first aperture configured to define an illumination condition for illuminating an illumination surface to a first condition, and a second aperture configured to define the illumination condition to a second condition, and fixed on a pupil plane of an illumination optical system, a light shielding plate, and a driving unit configured to positions the light shielding plate such that a shielding region shields a second path extending from a light source to the illumination surface through the second aperture, when setting the illumination condition to the first condition, and positions the light shielding plate such that the shielding region shields a first path extending from the light source to the illumination surface through the first aperture, when setting the illumination condition to the second condition.
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