Altering capacitance of MIM capacitor having reactive layer therein

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United States of America Patent

PATENT NO 9013857
APP PUB NO 20130107416A1
SERIAL NO

13716731

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Abstract

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Embodiments of a method include forming a metal-insulator-metal (MIM) capacitor including a first electrode and a second electrode and an insulator layer between the first and second electrodes, the MIM capacitor also including a reactive layer; and altering the reactive layer to change a capacitive value of the MIM capacitor.

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Patent Owner(s)

Patent OwnerAddress
GLOBALFOUNDRIES U S INC400 STONEBREAK ROAD EXTENSION MALTA NY 12020

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Edelstein, Daniel C White Plains, US 303 6461
Stamper, Anthony K Williston, US 615 6820

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