MEMS microphone with spring suspended backplate

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United States of America Patent

PATENT NO 9002039
APP PUB NO 20130108084A1
SERIAL NO

13719466

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Abstract

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A MEMS microphone has a base, a backplate, and a backplate spring suspending the backplate from the base. The microphone also has a diaphragm forming a variable capacitor with the backplate.

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Patent Owner(s)

Patent OwnerAddress
INVENSENSE INC1745 TECHNOLOGY DRIVE SUITE 200 SAN JOSE CA 95110

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Zhang, Xin Acton, US 895 4200

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