METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

Number of patents in Portfolio can not be more than 2000

United States of America Patent

APP PUB NO 20130109200A1
SERIAL NO

13659494

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

There can be obtained a method for manufacturing a semiconductor device in which adherence of particles can be suppressed and printing onto a substrate can be done. The method for manufacturing a semiconductor device includes the steps of: preparing a substrate formed of a semiconductor; forming a protective film to cover at least a part of a main surface of the substrate; and doing printing onto the substrate by irradiating, with laser, the main surface having the protective film. In the step of forming a protective film, the protective film made of a material having a band gap larger than that of the semiconductor constituting the substrate is formed. In the step of doing printing onto the substrate, the substrate is irradiated with laser Lb having such a wavelength that an absorptance of the material for the protective film is smaller than that of the semiconductor constituting the substrate.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
SUMITOMO ELECTRIC INDUSTRIES LTDJAPAN

International Classification(s)

  • [Classification Symbol]
  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
MIYAZAKI, Tomihito Osaka-shi, JP 23 414

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation