Database-driven cell-to-cell reticle inspection

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United States of America Patent

PATENT NO 8914754
SERIAL NO

13809825

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Abstract

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A semiconductor inspection apparatus identifies regions of a reticle or semiconductor wafer appropriate for cell-to-cell inspection by analyzing a semiconductor design database. Appropriate regions can be identified in a region map for use by offline inspection tools.

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Patent Owner(s)

Patent OwnerAddress
KLA-TENCOR CORPORATIONONE TECHNOLOGY DRIVE MILPITAS CA 95035

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Guan, Chun Santa Clara, US 5 207
Hess, Carl Los Altos, US 15 673
Miller, John D San Jose, US 85 3693
Rui-Fang, Shi Cupertino, US 1 4

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