Method for manufacturing a high-capacitance RF MEMS switch
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United States of America Patent
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Jun 21, 2016
Grant Date -
May 9, 2013
app pub date -
Dec 26, 2012
filing date -
Apr 22, 2010
priority date (Note) -
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Abstract
Systems and methods for providing high-capacitive RF MEMS switches are provided. In one embodiment, the invention relates to a micro-electro-mechanical switch assembly including a substrate, an electrode disposed on a portion of the substrate, a dielectric layer disposed on at least a portion of the electrode, a metal layer disposed on at least a portion of the dielectric layer, and a flexible membrane having first and second ends supported at spaced locations on the substrate base, where the flexible membrane is configured to move from a default position to an actuated position in response to a preselected switching voltage applied between the flexible membrane and the electrode, and where, in the actuated position, the flexible membrane is in electrical contact with the metal layer.
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