Tunable filter structures and design structures
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United States of America Patent
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Jun 9, 2015
Grant Date -
May 9, 2013
app pub date -
Nov 9, 2011
filing date -
Nov 9, 2011
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Abstract
Tunable filter structures, methods of manufacture and design structures are disclosed. The method of forming a filter structure includes forming a piezoelectric resonance filter over a cavity structure. The forming of the piezoelectric resonance filter includes: forming an upper electrode on one side of a piezoelectric material; and forming a lower electrode on an opposing side of the piezoelectric material. The method further includes forming a micro-electro-mechanical structure (MEMS) cantilever beam at a location in which, upon actuation, makes contact with the piezoelectric resonance filter.
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