Compact encoder head for interferometric encoder system

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United States of America Patent

PATENT NO 9201313
APP PUB NO 20130114062A1
SERIAL NO

13672234

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Abstract

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An encoder system includes an encoder scale and an encoder head, in which the encoder head is configured to combine each twice-diffracted measurement beam of multiple twice-diffracted measurement beams with a corresponding reference beam to form multiple output beams, where the encoder head includes a monolithic optical component having multiple facets, the multiple facets being arranged to: receive multiple once-diffracted measurement beams from a surface of the encoder scale; and redirect the multiple once-diffracted measurement beams back towards the surface of the encoder scale, the encoder scale being positioned in a path of the once-diffracted measurement beams to produce the twice-diffracted measurement beams.

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Patent Owner(s)

Patent OwnerAddress
ZYGO CORPORATION21 LAUREL BROOK ROAD MIDDLEFIELD CT 06455

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Liesener, Jan Middletown, US 21 315

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