Ceramic member, probe holder, and manufacturing method of ceramic member
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United States of America Patent
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Jan 19, 2016
Grant Date -
May 9, 2013
app pub date -
Jul 13, 2011
filing date -
Jul 14, 2010
priority date (Note) -
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Abstract
There is provided a ceramic member which is a sintered body containing enstatite and boron nitride as constituents, in which boron nitride is oriented in a single direction, a probe holder formed using the ceramic member, and a manufacturing method of the ceramic member. In the ceramic member, an index of orientation degree is not less than 0.8. In so doing, it is possible to provide a ceramic member which has a free machining property, a coefficient of thermal expansion which is close to that of silicon, and high strength, and a probe holder which is formed using the ceramic member, and a manufacturing method of the ceramic member.
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