METHOD OF MANUFACTURING THIN FILM-BONDED SUBSTRATE

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United States of America Patent

APP PUB NO 20130115753A1
SERIAL NO

13668831

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A method of manufacturing a thin film-bonded substrate in which a high-quality gallium nitride (GaN) thin film can be transferred. The method includes implanting ions into a first

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Patent OwnerAddress
SAMSUNG CORNING PRECISION MATERIALS CO LTDGYEONGBUK SOUTH KOREA CHUNGCHEONGBUK-DO

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Inventor Name Address # of filed Patents Total Citations
EO, Sungwoo ChungCheongNam-Do, KR 11 8
KIM, Kyoungjun ChungCheongNam-Do, KR 15 29

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