INERTIAL SENSOR AND METHOD OF MANUFACTURING THE SME
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United States of America Patent
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Issued Date -
May 16, 2013
app pub date -
Oct 12, 2012
filing date -
Nov 10, 2011
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
Disclosed herein are an inertial sensor and a method of manufacturing the same. The inertial sensor includes: a flexible part; a mass body movably supported by the flexible part and including a metal; a post supporting the flexible part; piezoelectric elements driving the mass body or sensing displacement of the mass body; and a package enclosing the flexible part, the mass body, and the post, wherein the metal has a melting point lower than the Curie temperature of the piezoelectric elements and higher than that of a solder forming connection parts for a surface mounting technology (SMT) provided on the package.
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