MEMS capacitive pressure sensor, operating method and manufacturing method
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United States of America Patent
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Jul 5, 2016
Grant Date -
May 16, 2013
app pub date -
May 2, 2012
filing date -
May 4, 2011
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Abstract
A MEMS pressure sensor wherein at least one of the electrode arrangements comprises an inner electrode and an outer electrode arranged around the inner electrode. The capacitances associated with the inner electrode and the outer electrode are independently measured and can be differentially measured. This arrangement enables various different read out schemes to be implemented and also enables improved compensation for variations between devices or changes in device characteristics over time.
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