STORAGE CAPACITOR FOR ELECTROMECHANICAL SYSTEMS AND METHODS OF FORMING THE SAME
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United States of America Patent
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Issued Date -
May 16, 2013
app pub date -
Nov 21, 2011
filing date -
Nov 11, 2011
priority date (Note) -
Abandoned
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Abstract
This disclosure provides systems, methods and apparatus for storage capacitors. In one aspect, an electromechanical systems (EMS) device includes a substrate, an optical stack disposed over the substrate, a mechanical layer positioned over the optical stack, and a storage capacitor. The optical stack includes a stationary electrode and at least one dielectric layer disposed over the stationary electrode, and the storage capacitor includes a first plate, a second plate and a dielectric structure disposed between the first and second plates. The first plate includes a portion of the mechanical layer positioned over an optically non-active region of the device, and the dielectric structure of the storage capacitor includes a portion of the at least one dielectric layer of the optical stack.
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