GRAPHENE MANUFACTURING APPARATUS AND METHOD

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United States of America Patent

APP PUB NO 20130122220A1
SERIAL NO

13807360

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Abstract

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A graphene manufacturing apparatus includes a gas supplying unit supplying a gas including carbon; a gas heating unit heating the gas supplied from the gas supplying unit; a deposition chamber in which a substrate having a catalyst layer is disposed; and an inlet pipe introducing the gas of the gas heating unit into the deposition chamber. A temperature of the deposition chamber is set at a temperature lower than a temperature of the gas heating unit so that a selection range with respect to a catalyst metal to be used in the catalyst layer may be expanded, and damage of the substrate due to a high temperature heat may be minimized.

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Patent Owner(s)

Patent OwnerAddress
HANWHA TECHWIN CO LTDGYEONGNAM CHANGWON CITY SOUTH KOREA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cho, Seung-Min Changwon-city, KR 5 25
Won, Dong-Kwan Changwon-city, KR 18 70

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