Method for removing metallic nanotube

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United States of America Patent

PATENT NO 8664091
APP PUB NO 20130122690A1
SERIAL NO

13504043

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Abstract

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A method for removing a metallic nanotube, which is formed on a substrate in a first direction, includes forming a plurality of conductors in a second direction crossing the first direction, electrically contacting the plurality of conductors with metallic nanotube, respectively, forming at least two voltage-applying electrodes on the conductors, each of which electrically contacting at least one of the conductors, and applying voltages to at least some of the conductors through the voltage-applying electrodes, respectively. Among the conductors to which the voltages are respectively applied, every two adjacent conductors have an electrical potential difference created therebetween, so as to burn out the metallic nanotube.

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Patent Owner(s)

Patent OwnerAddress
INSTITUTE OF MICROELECTRONICS CHINESE ACADEMY OF SCIENCESNO 3 BEITUCHENG WEST ROAD CHAOYANG DISTRICT BEIJING 100029 100029

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Luo, Zhijiong Poughkeepsie, US 255 4762
Yin, Haizhou Poughkeepsie, US 244 3095
Zhu, Huilong Poughkeepsie, US 705 13304

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