Non-volatile memory devices having dual heater configurations and methods of fabricating the same
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United States of America Patent
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Nov 24, 2015
Grant Date -
May 23, 2013
app pub date -
Jul 12, 2012
filing date -
Nov 23, 2011
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Abstract
A non-volatile memory device includes a data storage structure coupled between first and second conductive lines of the memory device. The data storage structure includes a conductive lower heater element, a data storage pattern, and a conductive upper heater element sequentially stacked. At least one sidewall surface of the data storage pattern is coplanar with a sidewall surface of the upper heater element thereabove and a sidewall surface of the lower heater element therebelow. Related fabrication methods are also discussed.
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