Substrate aligning unit, substrate processing apparatus having the same, and method of aligning substrate using the same
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United States of America Patent
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Feb 16, 2016
Grant Date -
May 23, 2013
app pub date -
Jul 25, 2012
filing date -
Nov 18, 2011
priority date (Note) -
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status (Latency Note)
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Abstract
A substrate aligning unit includes a first driving roll, a second driving roll, a web guider, an encoder roll, and a controller. The first driving roll transfers a substrate in a first direction. The second driving roll is disposed spaced apart from the first driving roll in the first direction and transfers the substrate in the first direction. The web guider controls a position of the substrate in a second direction substantially perpendicular to the first direction. The encoder roll senses the position of the substrate to generate a sensing signal. The controller controls the first driving roll, the second driving roll, and the web guider based on the sensing signal.
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