SPREAD ANALYSIS DEVICE FOR LUBRICANT, METHOD, AND RECORDING MEDIUM

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United States of America Patent

APP PUB NO 20130126736A1
SERIAL NO

13648559

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An electromagnetic wave output device outputs an electromagnetic wave. An optical element has a total reflection surface for totally reflecting the electromagnetic wave, and causes the device under test to receive an evanescent wave generated from the total reflection surface. An electromagnetic wave detector detects the electromagnetic wave, and a spectrum deriver derives a reflectance of the electromagnetic wave on the total reflection surface or a value based on the reflectance based on a detection result by the electromagnetic wave detector while the reflectance or the value based on the reflectance is associated with the frequency of the electromagnetic wave and a manufacturing condition of the particle or the device under test. A characteristic extractor extracts a characteristic based on the manufacturing condition from a derived result by the spectrum deriver.

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Patent Owner(s)

Patent OwnerAddress
ADVANTEST CORPORATION1-6-2 MARUNOUCHI CHIYODA-KU TOKYO 1000005 ?1000005

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
IRISAWA, Akiyoshi Miyagi, JP 19 59
KATO, Eiji Miyagi, JP 111 1921

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