METHOD OF MANUFACTURING ORGANIC EL APPARATUS
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United States of America Patent
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Issued Date -
May 23, 2013
app pub date -
Nov 14, 2012
filing date -
Nov 18, 2011
priority date (Note) -
Abandoned
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Abstract
In a method of manufacturing an organic EL apparatus, a mask layer is formed on an organic compound layer, and a region not covered with the mask layer is patterned by dry etching, in which a charge injection layer is formed using an inorganic compound that has a low etching rate with respect to an etching gas used for patterning of the organic compound layer and that is not decomposed even when exposed to the etching gas.
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