Capacitive pressure sensor and method for manufacturing same
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United States of America Patent
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Jun 17, 2014
Grant Date -
May 23, 2013
app pub date -
Jul 21, 2011
filing date -
Aug 13, 2010
priority date (Note) -
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Abstract
The capacitive pressure sensor comprises: a substrate functioning as a lower electrode; a first insulating film formed on the substrate; a cavity formed on the first insulating film; a second insulating film formed on the first insulating film to have openings communicated with the cavity and to cover the cavity; a sealing film formed of a conductive material to seal the openings and to extend partially into the cavity through the openings; and an upper electrode formed on the second insulating film to be electrically separated from the sealing film and to overlap the cavity.
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