Method for Stacking Devices and Structure Thereof

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United States of America Patent

SERIAL NO

13716844

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Abstract

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A semiconductor device that has a first device that includes a first through-silicon via (TSV) structure, a first coating material disposed over the first device, the first coating material continuously extending over the first device and covering the first TSV structure, a second device disposed over the first device and within the first coating material, the second device includes a second TSV structure and a plurality of conductive bumps, the plurality of conductive bumps are positioned within the first coating material, a second coating material disposed over the second device, the second coating material continuously extends over the second device and covers the second TSV structure, and a third device disposed over the second coating material, the third device includes a third TSV structure.

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Patent Owner(s)

Patent OwnerAddress
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD8 LI-HSIN RD 6 HSINCHU SCIENCE PARK HSINCHU 300-78

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chao, Clinton Hsinchu, TW 34 1503
Karta, Tjandra Winata Chu-Pei, TW 20 916
Lee, Chien-Hsiun Hsinchu, TW 50 1191
Lii, Mirng-Ji Sinpu Township, TW 254 6304
Wang, Dean Tainan, TW 21 380

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