SEMICONDUCTOR DEVICES INCLUDING DUAL DAMASCENE METALLIZATION STRUCTURES

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United States of America Patent

APP PUB NO 20130127056A1
SERIAL NO

13669681

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Abstract

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A semiconductor device can include a dual-damascene metallization structure that may provide a reduced resistance by providing barrier layers that are different materials. The semiconductor device can include a device layer and a lower conductive layer that can be electrically connected to the device layer. A lower barrier layer can surround the lower conductive layer and an upper conductive layer can be disposed on the lower conductive layer and can be electrically connected to the lower conductive layer. An upper barrier layer can surround the upper conductive layer and can including material that is different from a material included in the lower barrier layer.

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Patent Owner(s)

Patent OwnerAddress
SAMSUNG ELECTRONICS CO LTD129 SAMSUNG-RO YEONGTONG-GU SUWON-SI GYEONGGI-DO 16677

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Choi, Gil-heyun Choi Seoul, KR 1 5
Jung, Eun-ji Hwaseong-si, KR 51 904
Matsudat, Sukasa Seongnam-si, KR 1 5
Yun, Jong-ho Suwon-si, KR 36 645

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