Immersion exposure apparatus and method with detection of liquid on members of the apparatus

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United States of America Patent

PATENT NO 9250537
APP PUB NO 20130128245A1
SERIAL NO

13742743

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Abstract

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An exposure apparatus which prevents the damage due to the liquid having flowed out from spreading and enables satisfactory performances of the exposure processes and the measurement processes is provided. An exposure apparatus (EX) includes a movable table (PT), a base member (41) having an upper surface (41A) that guides the movement of the table (PT), and a detecting device (60) that detects whether there is a liquid on the upper surface (41A) of the base member (41).

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Patent Owner(s)

Patent OwnerAddress
NIKON CORPORATIONMINATO-KU TOKYO 108-6290

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Shibuta, Makoto Kumagaya, JP 19 281

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