Anamorphically imaging projection lens system and related optical systems, projection exposure systems and methods

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United States of America Patent

PATENT NO 9366968
SERIAL NO

13744782

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Abstract

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An imaging optical system for a projection exposure system has at least one anamorphically imaging optical element. This allows a complete illumination of an image field in a first direction with a large object-side numerical aperture in this direction, without the extent of the reticle to be imaged having to be enlarged and without a reduction in the throughput of the projection exposure system occurring.

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Patent Owner(s)

Patent OwnerAddress
CARL ZEISS SMT GMBH73447 OBERKOCHEN

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Mann, Hans-Juergen Oberkochen, DE 150 1052

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