Multi facet mirror of a microlithographic projection exposure apparatus with a tilting actuator
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United States of America Patent
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May 26, 2015
Grant Date -
May 23, 2013
app pub date -
Jan 22, 2013
filing date -
Aug 25, 2010
priority date (Note) -
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Abstract
A multi facet mirror of a microlithographic projection exposure apparatus includes a plurality of mirror facet units. Each unit includes a mirror member with a body, a reflective coating provided at one end of the body and an actuating surface provided at an opposite end. The unit further includes a rest member on which the actuating surface rests while the mirror member is not moving, and an actuator that tilts the mirror member about a tilting axis. The actuator has a contact surface and a lifting member which moves the actuating surface along a lifting direction. In a first operating state of the lifting member the actuating surface rests on the rest member and in a second operating state on the contact surface. A displacement member displaces the contact surface along a lateral direction only while the lifting member is in the second operating state.
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