METHOD OF MANUFACTURING THIN FILM CAPACITOR AND THIN FILM CAPACITOR
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United States of America Patent
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app pub date -
Nov 13, 2012
filing date -
Mar 31, 2009
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Abstract
A method of manufacturing a thin film capacitor, having: a base electrode; dielectric layers consecutively deposited on the base electrode; an internal electrode deposited between the dielectric layers; an upper electrode deposited opposite the base electrode with the dielectric layers and the internal electrode being interposed therebetween; and a cover layer deposited on the upper electrode, has depositing an upper electrode layer which is to be the upper electrode, and a cover film which is to be the cover layer on the unsintered dielectric film which is to be the dielectric layer, to fabricate a lamination component, and sintering the lamination component.
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