Chamber sealing member
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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Apr 14, 2015
Grant Date -
May 23, 2013
app pub date -
Nov 14, 2012
filing date -
Nov 23, 2011
priority date (Note) -
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status (Latency Note)
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Abstract
A reaction chamber including an upper region for processing a substrate, a lower region for loading a substrate, a susceptor movable within the reaction chamber, a first sealing member positioned on a perimeter of the susceptor, a second sealing member positioned between the upper region and the lower region, wherein the first and second sealing members are selectively engaged with one another to limit communication between the upper region and the lower region.
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Cited Art Landscape
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