COMPOSITION FOR REMOVAL OF NICKEL-PLATINUM ALLOY-BASED METALS
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United States of America Patent
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Issued Date -
May 23, 2013
app pub date -
Jul 19, 2011
filing date -
Aug 5, 2010
priority date (Note) -
Abandoned
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Abstract
A composition for the removal of nickel-platinum alloy metal, said composition being characterised by including 3-55 mass % of at least one kind selected from the group consisting of hydrochloric acid, hydrobromic acid, and nitric acid, 0.5-20 mass % of a chelating agent other than oxalic acid, 0.1-4 mass % of an anionic surfactant, and water; and also characterised by not including fluorine-containing compounds or hydrogen peroxide, and having a pH of 1 or less. Nickel-platinum alloy metal can be selectively removed without damaging silicon substrate material.
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