Auto device skew manufacturing

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United States of America Patent

PATENT NO 8942840
SERIAL NO

13743096

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A system and method for manufacturing semiconductor devices is disclosed. An embodiment comprises using desired device parameters to choose an initial manufacturing recipe. Once chosen, the initial manufacturing recipe may be modified by determining and applying an offset adjustment based on previous manufacturing to tune the recipes for the particular equipment to be utilized in the manufacturing process.

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Patent Owner(s)

Patent OwnerAddress
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD8 LI-HSIN RD 6 HSINCHU SCIENCE PARK HSINCHU 300-78

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chao, Hui-Yun Zhubei, TW 9 60
Chen, Jui-Long Taichung, TW 12 72
Ho, Chia-Tong Taipei, TW 11 86

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