Substrate breakdown voltage improvement for group III-nitride on a silicon substrate

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United States of America Patent

PATENT NO 9111904
SERIAL NO

13650548

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Abstract

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A method of making a high-electron mobility transistor (HEMT) includes forming an unintentionally doped gallium nitride (UID GaN) layer over a silicon substrate, a donor-supply layer over the UID GaN layer, a gate, a passivation layer over the gate and portions of the donor-supply layer, an ohmic source structure and an ohmic drain structure over the donor-supply layer and portions of the passivation layer. The source structure includes a source contact portion and an overhead portion. The overhead portion overlaps the passivation layer between the source contact portion and the gate, and may overlap a portion of the gate and a portion of the passivation layer between the gate and the drain structure.

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Patent Owner(s)

Patent OwnerAddress
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTDHSINCHU

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hsu, Chun-Wei Taichung, TW 114 641
Wong, King-Yuen Tuen Mun, HK 69 503
Yao, Fu-Wei Hsinchu, TW 78 460
Yu, Chen-Ju Jiaoxi Township, TW 50 326
Yu, Jiun-Lei Jerry Zhudong Township, TW 87 471

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