System for attachment of an electrode into a plasma source

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9053895
APP PUB NO 20130134855A1
SERIAL NO

13307830

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

An inductively coupled plasma charged particle source for focused ion beam systems includes a plasma reaction chamber with a removably attached source electrode. A fastening mechanism connects the source electrode with the plasma reaction chamber and allows for a heat-conductive, vacuum seal to form. With a removable source electrode, improved serviceability and reuse of the plasma source tube are now possible.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
FEI COMPANY5350 NE DAWSON CREEK HILLSBORO OR 97124

International Classification(s)

  • [Classification Symbol]
  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Graupera, Anthony Hillsboro, US 18 192
Kellogg, Sean Portland, US 18 145
Parker, N William Hillsboro, US 55 1201
Schwind, Gregory A Portland, US 18 83
Skoczylas, Walter Aloha, US 5 66
Smith, Noel Portland, US 29 461
Utlaut, Mark W Scappoose, US 40 492
Wells, Andrew B Portland, US 6 56
Zhang, Shouyin Portland, US 15 123

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
7.5 Year Payment $3600.00 $1800.00 $900.00 Dec 9, 2022
11.5 Year Payment $7400.00 $3700.00 $1850.00 Dec 9, 2026
Fee Large entity fee small entity fee micro entity fee
Surcharge - 7.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00