C-CORE ACTUATOR FOR MOVING A STAGE
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United States of America Patent
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Issued Date -
May 30, 2013
app pub date -
Nov 29, 2012
filing date -
Nov 30, 2011
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A mover assembly (46) for moving a stage (14) includes an actuator (30) that is coupled to the stage (14). The actuator (30) includes (i) a C-Core (52) having a generally “C” shape and including a first transverse leg (260), a second transverse leg (262) that is spaced apart from the first transverse leg (260), and a connector region (264) that connects the transverse legs (260), (262); (ii) a coil (270) that is wrapped around the first transverse leg (260); and (ii) an I core (250) that is spaced apart a gap (254) from the C-Core (252).
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