Method for manufacturing a magnetic sensor using two step ion milling
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United States of America Patent
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Dec 31, 2013
Grant Date -
May 30, 2013
app pub date -
Nov 29, 2011
filing date -
Nov 29, 2011
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Abstract
A method for manufacturing a magnetic sensor that includes depositing a plurality of mask layers, then forming a stripe height defining mask over the sensor layers. A first ion milling is performed just sufficiently to remove portions of the free layer that are not protected by the stripe height defining mask, the first ion milling being terminated at the non-magnetic barrier or spacer layer. A dielectric layer is then deposited, preferably by ion beam deposition. A second ion milling is then performed to remove portions of the pinned layer structure that are not protected by the mask, the free layer being protected during the second ion milling by the dielectric layer.
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