PVD apparatus and method with deposition chamber having multiple targets and magnets

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United States of America Patent

PATENT NO 9708706
SERIAL NO

13307242

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Abstract

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A thin film deposition system and method provide for multiple target assemblies that may be separately powered. Each target assembly includes a target and associated magnet or set of magnets. The disclosure provides a tunable film profile produced by multiple power sources that separately power the target arrangements. The relative amounts of power supplied to the target arrangements may be customized to provide a desired film and may be varied in time to produce a film with varied characteristics.

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Patent Owner(s)

Patent OwnerAddress
TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD8 LI-HSIN RD 6 HSINCHU SCIENCE PARK HSINCHU 300-78

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chiang, Chen-Chia Zhunan Township, TW 4 6
Chou, You-Hua Taipei, TW 118 1212
Kao, Chung-En Toufen Township, TW 30 428
Kuo, Ming-Shiou Taichung, TW 8 32
Lee, Chih-Tsung Hsinchu, TW 48 586
Tsai, Ming-Chin Hsinchu, TW 25 421

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