TEXTURE-ETCHANT COMPOSITION FOR CRYSTALLINE SILICON WAFER AND METHOD FOR TEXTURE-ETCHING (2)

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United States of America Patent

APP PUB NO 20130137278A1
SERIAL NO

13816294

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Abstract

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Disclosed herein is an etching composition for texturing a crystalline silicon wafer, comprising, based on a total amount of the composition: (A) 0.1 to 20 wt % of an alkaline compound; (B) 0.1 to 50 wt % of a cyclic compound having a boiling point of 100° C. or more; (C) 0.000001 to 10 wt % of a fluorine-based surfactant; and (D) residual water. The etching composition can maximize the absorbance of light of the surface of a crystalline silicon wafer.

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Patent Owner(s)

Patent OwnerAddress
DONGWOO FINE-CHEM CO LTDJEONBUK SOUTH KOREA GYEONGSANGBUK-DO

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hong, Hyung-Pyo Iksan-si, KR 10 56
Lee, Jae-Youn Iksan-si, KR 8 48
Lim, Dae-Sung Iksan-si, KR 10 37

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