Carbon nanotube contact structures for use with semiconductor dies and other electronic devices

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United States of America Patent

PATENT NO 8756802
APP PUB NO 20130140057A1
SERIAL NO

13731259

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Abstract

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A method of making carbon nanotube contact structures on an electronic device includes growing a plurality of carbon nanotube columns on a mandrel. Electrically-conductive adhesive is applied to ends of the columns distal from the mandrel, and the columns are transferred to the electronic device. An electrically-conductive material is deposited onto some or all of the columns. The mandrel can be reused to grow a second plurality of carbon nanotube columns.

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Patent Owner(s)

  • FORMFACTOR, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Gritters, John K Livermore, US 23 271
Martens, Rodney I Livermore, US 6 68
Yaglioglu, Onnik Livermore, US 17 124

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