TEMPERATURE CONTROL OF A MOVER WITH ACTIVE BYPASS, PREDICTIVE FEEDFORWARD CONTROL, AND PHASE CHANGE HOUSING
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United States of America Patent
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Issued Date -
Jun 6, 2013
app pub date -
Jan 31, 2013
filing date -
Jun 30, 2011
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Abstract
A stage assembly includes (i) a stage; (ii) a base assembly; (iii) a stage mover, and (iv) a temperature controller. The stage mover includes a magnet array and a conductor array. The conductor array can be grouped into one or more zones. The temperature controller selectively directs a circulation fluid at a first temperature, and at a second temperature to each zone. Feedforward signals based on the expected heat dissipation of the conductor array can be used to improve the response time of the temperature controller. The temperature controller can include a phase change material and a housing assembly that retains the phase change material in an enclosed chamber near the conductor array.
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