GALLIUM NITRIDE GROWTH METHOD ON SILICON SUBSTRATE

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United States of America Patent

APP PUB NO 20130140525A1
SERIAL NO

13308997

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Abstract

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A semiconductor structure includes a silicon substrate; more than one bulk layer of group-III/group-V (III-V) compound semiconductor atop the silicon substrate; and each bulk layer of the group III-V compound is separated by an interlayer.

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Patent Owner(s)

Patent OwnerAddress
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTDNO 8 LI-HSIN 6 ROAD HSINCHU SCIENCE PARK HSINCHU 30077

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
CHEN, Chi-Ming Zhubei City, TW 191 1511
HWANG, Ho-Yung David Hsinchu, TW 46 361
LIN, Hung-Ta Hsinchu City, TW 44 945
LIU, Po-Chun Hsinchu City, TW 106 466
TSAI, Chia-Shiung Hsinchu, TW 515 6971
YU, Chung-Yi Hsinchu, TW 191 1387

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