MANUFACTURING METHOD FOR CRYSTALLINE SEMICONDUCTOR FILM, SEMICONDUCTOR DEVICE, AND DISPLAY DEVICE

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United States of America Patent

APP PUB NO 20130140573A1
SERIAL NO

13701536

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Abstract

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An object is to form a crystalline semiconductor film including a plurality of semiconductor regions with different average grain sizes by a simple manufacturing process.

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Patent Owner(s)

Patent OwnerAddress
SHARP KABUSHIKI KAISHA1 TAKUMI-CHO SAKAI-KU SAKAI CITY OSAKA 5908522 ?5908522

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Nakamura, Yoshinobu Osaka-shi, JP 112 1690

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