Methods for forming MEMS devices
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United States of America Patent
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Jan 7, 2014
Grant Date -
Jun 6, 2013
app pub date -
Dec 2, 2011
filing date -
Dec 2, 2011
priority date (Note) -
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Abstract
A method includes forming a Micro-Electro-Mechanical System (MEMS) device on a front surface of a substrate. After the step of forming the MEMS device, a through-opening is formed in the substrate, wherein the through-opening is formed from a backside of the substrate. The through-opening is filled with a dielectric material, which insulates a first portion of the substrate from a second portion of the substrate. An electrical connection is formed on the backside of the substrate. The electrical connection is electrically coupled to the MEMS device through the first portion of the substrate.
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