Profile measuring apparatus, structure manufacturing system, method for measuring profile, method for manufacturing structure, and non-transitory computer readable medium
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United States of America Patent
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Feb 13, 2018
Issued Date -
N/A
app pub date -
Oct 10, 2012
filing date -
Oct 11, 2011
priority date (Note) -
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status (Latency Note)
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Abstract
There is provided a form measuring apparatus including: an imager configured to take an image of a object, an irradiator configured to irradiate a measurement light from a projection direction different from the direction along which the imager performs imaging to form a predetermined light amount distribution on the object, a reference light generator configured to generate a reference light to irradiate the object, and a detector configured to detect a target area for form measurement of the object based on a pickup image taken by the imager as the reference light is irradiated on the object.
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