TARGET FOR LARGE SCALE METROLOGY SYSTEM
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United States of America Patent
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N/A
Issued Date -
Jun 6, 2013
app pub date -
Jun 4, 2012
filing date -
Jun 9, 2011
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A target (16) for a metrology system (10) that monitors the position of an object (12) includes a target housing (225) and a photo detector assembly (226). The target housing (225) can include a first target surface (218A), and a second target surface (218B) that is at an angle relative to the first target surface (218A). The photo detector assembly (226) can include a first detector (220A) that is secured to the first target surface (218A), and a second detector (220B) that is secured to the second target surface (218B). Each of the detectors (220A) (220B) can be a quad cell that includes four detector cells (238A) (238B) (238C) (238D) that are separated by a gap (236).
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