Systems and methods of automatic boundary control for semiconductor processes
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United States of America Patent
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Feb 2, 2016
Grant Date -
Jun 6, 2013
app pub date -
Dec 6, 2011
filing date -
Dec 6, 2011
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Abstract
A system and method of automatically calculating boundaries for a semiconductor fabrication process. The method includes selecting a first parameter for monitoring during a semiconductor fabrication process. A first set of values for the first parameter are received and a group value of the first set is determined. Each value in the first set of values is normalized. A first weighting factor is selected based on a number of values in the first set. The embodiment also includes generating a first and a second boundary value as a function of the weighting factor, the first set normalized values and the group value of the first set and applying the first and second boundary values to control the semiconductor fabrication process.
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