Passivation layer for packaged chip

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United States of America Patent

PATENT NO 8558229
APP PUB NO 20130147032A1
SERIAL NO

13313747

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Abstract

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The embodiments described above provide mechanisms for forming metal bumps on metal pads with testing pads on a packaged integrated circuit (IC) chip. A passivation layer is formed to cover the testing pads and possibly portions of metal pads. The passivation layer does not cover surfaces away from the testing pad region and the metal pad region. The limited covering of the testing pads and the portions of the metal pads by the passivation layer reduces interface resistance for a UBM layer formed between the metal pads and the metal bumps. Such reduction of interface resistance leads to the reduction of resistance of the metal bumps.

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Patent Owner(s)

Patent OwnerAddress
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTDHSINCHU

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chiu, Tzu-Wei Hsinchu, TW 34 1123
Hou, Shang-Yun Jubei, TW 274 9801
Hsu, Kuo-Ching Chung-Ho, TW 83 2166
Jeng, Shin-Puu Hsinchu, TW 851 18082
Liu, Tzuan-Horng Longtan Township, TW 133 766
Wu, Wei-Cheng Hsinchu, TW 245 5535
Yu, Chen-Hua Hsinchu, TW 2207 47923

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