STAGE UNIT, EXPOSURE APPARATUS, AND EXPOSURE METHOD
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United States of America Patent
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Issued Date -
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app pub date -
Feb 5, 2013
filing date -
Jun 7, 2004
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
A power usage supply unit-that supplies power usage to a stage which moves on a movement surface has a first axis section, first support sections, a second axis section, and a second support section. The first axis section is movably supported by the first support section in a direction of the first axis and around the first axis, and the second axis section is movably supported by the second support section in a direction of the second axis and around the second axis. And, by employing a mechanism in which the power usage supply unit has at least four degrees of freedom, the power usage supply unit does not interfere with the movement of a stage even when the stage moves in the first and second axis directions and in the rotational direction of each axis, therefore, decrease in position controllability of the stage caused by dragging a tube can be completely avoided.
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Cited Art Landscape
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