Illumination device for optimizing polarization in an illumination pupil

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United States of America Patent

PATENT NO 9732934
SERIAL NO

13662140

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Abstract

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A new and useful illumination device, e.g. for a lithographic optical imaging system, is provided, and comprises a mirror array located between a radiation source and an illumination pupil. Each mirror element of the mirror array is individually steerable (controllable), and the polarization state of light from each mirror element of the mirror array can be selectively controlled, so that the illumination pupil can be filled with a distribution of light that is selectively controlled.

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Patent Owner(s)

Patent OwnerAddress
NIKON CORPORATION1-5-20 NISHIOI SHINAGAWA-KU TOKYO 1408601 ?1408601

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Smith, Daniel Gene Tucson, US 58 195
Sogard, Michael Menlo Park, US 63 883

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