Interface structure for copper-copper peeling integrity

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United States of America Patent

PATENT NO 8592300
APP PUB NO 20130149856A1
SERIAL NO

13728833

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Abstract

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An integrated circuit device is disclosed. An exemplary integrated circuit device includes a first copper layer, a second copper layer, and an interface between the first and second copper layers. The interface includes a flat zone interface region and an intergrowth interface region, wherein the flat zone interface region is less than or equal to 50% of the interface.

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Patent Owner(s)

Patent OwnerAddress
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD8 LI-HSIN RD 6 HSINCHU SCIENCE PARK HSINCHU 300-78

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Lin, Cheng-Chung Taipei, TW 48 617
Liu, Chung-Sui Shin-Chu, TW 1 2
Yu, Chen-Hua Hsinchu, TW 2207 47923

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