THERMAL DIFFUSION CHAMBER WITH COOLING TUBES
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United States of America Patent
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app pub date -
Feb 18, 2013
filing date -
Dec 30, 2010
priority date (Note) -
Abandoned
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Abstract
Preferably, a frame supporting a containment chamber, which in turn confines a sealed process chamber, is provided. Further, at least one fluid inlet box in fluidic communication with an exterior of the sealed process chamber is presented, in which the fluid inlet box includes at least a flow adjustment structure to control a fluid flow from a fluid source around the exterior of the sealed process chamber; and an open loop heat exchange system in fluidic communication with an interior of the sealed process chamber is present, within at least a portion of the open loop heat exchange system resides internal to the sealed process chamber.
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