PROCESS FOR PRODUCTION OF SILANE AND HYDROHALOSILANES

United States of America Patent

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Issued Date
Jun 20, 2013
app pub date
Dec 16, 2011
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Dec 16, 2011

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Abandoned

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Abstract

Embodiments of a system and process for the production of ultra-high purity silane and hydrohalosilanes of the general formula H_ySiX_4-y(y=1, 2, or 3) by a reactive distillation method are disclosed.

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Patent Owner	Address
REC SILICON INC	3322 ROAD N NE MOSES LAKE WA 98837

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Inventor Name	Address	# of filed Patents	Total Citations
Breneman, William C	Moses Lake, US	14	132

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Maximum number of portfolios	5 (maximum)	10 (maximum)	100 (maximum)	Unlimited
Maximum number of comparisons	1 (maximum)	5 (maximum)	20 (maximum)	Unlimited

PROCESS FOR PRODUCTION OF SILANE AND HYDROHALOSILANES

Number of patents in Portfolio can not be more than 2000

United States of America Patent

13328820

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13328820

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